Title :
Formation of superpower volume discharges and their application for modification surface of metals
Author :
Tarasenko, Victor F. ; Shulepov, Mikhail A.
Author_Institution :
High Current Electron. Inst., Tomsk
Abstract :
Summary form only given. The results of experimental investigations of a volume avalanche discharge initiated by an e-beam (VADIEB) [1] and surface layer of Cu and AlBe foils modifications at the plasma action of VADIEB are given. The volume discharge in the air of atmosphere pressure formed in the gap with the cathode having small curvature radius and with high voltage pulses of nanosecond duration and positive and negative polarity. A supershort avalanche electron beam (SAEB [2]) with formation conditions in gases under atmospheric pressure have been investigated. It is proved that the surface layer is cleared of carbon at foil treatment, and atoms of oxygen penetrate into a foil. The cleaning depth depends on polarity of voltage pulses show. At positive polarity of a copper foil electrode, the cleaning is observed at the depth over 50 nm, and atoms of oxygen penetrate at the depth up to 25 nm. Plasma of the superpower volume discharge of nanosecond duration with a specific excitation power of hundreds of MW/cm3, and SAEB, and the discharge plasma radiation of various spectral ranges (including UV, VUV and X-ray) has the influence on the anode. The supershort avalanche electronic beam is generated only at negative polarity of a voltage pulse on an electrode with a small radius of curvature. SAEB influence on modifications of the copper foil surface is registered. VADIEB is easily realized in various gases and at various pressures, and, at gas pressure decrease, the density of the beam current in helium can achieve 2 kA/cm2 [3]. It allows predicting an opportunity of VADIEB application for metal surface modifications in various technological processes, and for surface dielectric modifications at the certain design of the anode.
Keywords :
avalanche breakdown; discharges (electric); metals; surface charging; VADIEB plasma action; anode; discharge plasma radiation; e-beam; metal modification surface; metal surface modifications; superpower volume discharges; supershort avalanche electron beam; surface dielectric modifications; surface layer; voltage pulse; volume avalanche discharge; Anodes; Atomic layer deposition; Atomic measurements; Cleaning; Copper; Electrodes; Gases; Plasma x-ray sources; Surface discharges; Voltage;
Conference_Titel :
Plasma Science, 2008. ICOPS 2008. IEEE 35th International Conference on
Conference_Location :
Karlsruhe
Print_ISBN :
978-1-4244-1929-6
Electronic_ISBN :
0730-9244
DOI :
10.1109/PLASMA.2008.4590883