• DocumentCode
    2439275
  • Title

    SAW Transduction on Silicon Substrates with PVF2 Films

  • Author

    Wagers, Robert S.

  • fYear
    1979
  • fDate
    26-28 Sept. 1979
  • Firstpage
    645
  • Lastpage
    648
  • Keywords
    Acoustic propagation; Optical films; Optical surface waves; Permittivity; Polarization; Semiconductor films; Silicon; Stress; Substrates; Surface acoustic waves;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    1979 Ultrasonics Symposium
  • Conference_Location
    New Orleans, LA, USA
  • Type

    conf

  • DOI
    10.1109/ULTSYM.1979.197283
  • Filename
    1534223
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2439275