Title :
High Mobility n and p Channels on Gallium Arsenide and Silicon Substrates Using Interfacial Misfit Dislocation Arrays
Author :
Shima, Darryl ; Balakrishnan, Ganesh
Author_Institution :
Univ. of New Mexico, Albuquerque, NM, USA
Abstract :
We demonstrate the growth of III-Sb buffers on GaAs and Silicon substrates through the use of an epitaxial technique involving the formation of interfacial misfit dislocation arrays that is formed between the III-Sb alloy and the substrate. The interfacial misfit array results in the spontaneous relaxation of the highly mismatched III-Sb semiconductor and provides a platform for the realization of high mobility channels on GaAs and Silicon. We make use of InAs type -- II confinement structures for n-type and pseudomorphic InGaSb type -- I structures for p-type channels.
Keywords :
Hall mobility; III-V semiconductors; buffer layers; dislocation arrays; gallium compounds; indium compounds; molecular beam epitaxial growth; semiconductor epitaxial layers; semiconductor growth; GaAs; III-Sb buffer growth; III-Sb semiconductors; InAs; InAs type-II confinement structures; InGaSb; Si; epitaxial technique; gallium arsenide substrates; high mobility channels; interfacial misfit dislocation arrays; n-type channels; p-type channels; pseudomorphic InGaSb type-I structures; silicon substrates; Epitaxial growth; Gallium arsenide; Silicon; Strain; Substrates; Surface treatment; Antimonides; III-V; Molecular Beam Epitaxy;
Conference_Titel :
VLSI (ISVLSI), 2014 IEEE Computer Society Annual Symposium on
Conference_Location :
Tampa, FL
Print_ISBN :
978-1-4799-3763-9
DOI :
10.1109/ISVLSI.2014.99