DocumentCode
2440344
Title
High Rate Deposition of Piezoelectric Zinc Oxide Films Using New Reactive Sputtering Technique
Author
Hata, Tomonobu ; Noda, Etsuji ; Morimoto, Osamu ; Hada, Toshio
fYear
1979
fDate
1979
Firstpage
936
Lastpage
939
Keywords
Electrodes; Magnetic confinement; Magnetic fields; Magnetic flux; Piezoelectric films; Sputtering; Substrates; Surface acoustic waves; Transducers; Zinc oxide;
fLanguage
English
Publisher
ieee
Conference_Titel
1979 Ultrasonics Symposium
Type
conf
DOI
10.1109/ULTSYM.1979.197341
Filename
1534281
Link To Document