DocumentCode :
2440344
Title :
High Rate Deposition of Piezoelectric Zinc Oxide Films Using New Reactive Sputtering Technique
Author :
Hata, Tomonobu ; Noda, Etsuji ; Morimoto, Osamu ; Hada, Toshio
fYear :
1979
fDate :
1979
Firstpage :
936
Lastpage :
939
Keywords :
Electrodes; Magnetic confinement; Magnetic fields; Magnetic flux; Piezoelectric films; Sputtering; Substrates; Surface acoustic waves; Transducers; Zinc oxide;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
1979 Ultrasonics Symposium
Type :
conf
DOI :
10.1109/ULTSYM.1979.197341
Filename :
1534281
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2440344
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