Microwave SAW Resonators Fabricated with Direct-Writing, Electron-Beam Lithography

Author

Cross, Peter S. ; Rissman, Paul ; Shreve, William R.

fYear

1980

fDate

1980

Firstpage

158

Lastpage

163

Keywords

Aluminum; Electrodes; Frequency; Gratings; Insertion loss; Lithography; Optical resonators; Propagation losses; Resists; Surface acoustic waves;

fLanguage

English

Publisher

ieee

Conference_Titel

1980 Ultrasonics Symposium

Type

DOI

10.1109/ULTSYM.1980.197379

Filename

1534319

Link To Document