DNA electrical detection based on inductor resonance frequency in standard CMOS technology

Author

Laurent, Guillaume ; Hagelsieb, L.M. ; Lederer, D. ; Lobert, P.E. ; Flandre, D. ; Remacle, J. ; Raskin, J.P.

Author_Institution

Lab. de Microelectronique, Univ. Catholique de Louvain, Louvain-la-Neuve, Belgium

fYear

2003

fDate

16-18 Sept. 2003

Firstpage

171

Lastpage

174

Abstract

Several electrical methods have been studied for the detection of DNA hybridization on silicon chips, using capacitance or resistance changes of micro-arrays of electrode fingers. In this work, we studied the possibility of detecting DNA by the measurement of the resonance frequency shift of an inductor designed on Si substrate. Self-resonance frequency shift as large as 10 GHz before and after DNA hybridization has been measured for inductors made from standard CMOS process. with a protective oxide coating and a DNA amplification based on silver enhancement.

Keywords

CMOS integrated circuits; DNA; biomedical electronics; biosensors; equivalent circuits; inductors; DNA electrical detection; DNA hybridization; electronic integration; equivalent circuit; immobilization; inductor resonance frequency; passive printed inductors; protective oxide coating; self-resonance frequency shift; silver enhancement; standard CMOS technology; CMOS technology; Capacitance; DNA; Electric resistance; Electrical resistance measurement; Frequency measurement; Inductors; Resonance; Resonant frequency; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

European Solid-State Device Research, 2003. ESSDERC '03. 33rd Conference on

Conference_Location

Estoril, Portugal

Print_ISBN

0-7803-7999-3

Type

conf

DOI

10.1109/ESSDERC.2003.1256838

Filename

1256838