Title :
A novel SCR-based protection structure against ESD with efficient multi-finger triggering
Author :
Azaïs, F. ; Caillard, B. ; Dournelle, S. ; Nouet, P. ; Salomé, P.
Author_Institution :
CNRS, Univ. Montpellier II, France
Abstract :
In this paper, a new SCR-based protection structure is presented relying on the bimodal operation of an LSCR. STMSCR (smart triggered multi-finger SCR) is multi-finger compliant, thus allowing area-efficient design of pad-located ESD protection. Without any process customisation, an HBM failure threshold over 115 V//spl mu/m is reached for the first time while always ensuring current uniformity in multi-finger structures.
Keywords :
electrostatic discharge; thyristors; trigger circuits; HBM failure threshold; LSCR bimodal operation; SCR-based protection structure; STMSCR; current uniformity; human body model; latch-up immunity; multifinger triggering; pad-located ESD protection; smart triggered multifinger SCR; CMOS technology; Cathodes; Chromium; Electrostatic discharge; Fingers; Inverters; Protection; Switches; Thyristors; Voltage;
Conference_Titel :
European Solid-State Device Research, 2003. ESSDERC '03. 33rd Conference on
Conference_Location :
Estoril, Portugal
Print_ISBN :
0-7803-7999-3
DOI :
10.1109/ESSDERC.2003.1256850
