Improved quality factor of thin film inductor by application of multilayer film

Author

Shirakawa, K. ; Kurata, H. ; Kasuya, M. ; Ohnuma, S. ; Toriu, J. ; Matsuki, H. ; Murakami, K.

Author_Institution

Amorphous Magnetic Device Lab.

fYear

1992

fDate

13-16 April 1992

Firstpage

235

Lastpage

235

Keywords

Frequency; Nonhomogeneous media; Q factor; Thin film inductors;

fLanguage

English

Publisher

ieee

Conference_Titel

Magnetics Conference, 1992. Digests of Intermag '92., International

Conference_Location

St. Louis, MO, USA

Print_ISBN

0-7803-0637-6

Type

DOI

10.1109/INTMAG.1992.696418

Filename

696418

Link To Document