Title :
Visualization of SAW Propagation with the Scanning Electron Microscope
Author :
Veith, R. ; Eberharter, G. ; Feuerbaum, H.P. ; Knauer, U.
Keywords :
Acoustic beams; Acoustic propagation; Acoustic transducers; Blanking; Electron beams; Monitoring; Scanning electron microscopy; Surface acoustic waves; Visualization; Voltage;
Conference_Titel :
1980 Ultrasonics Symposium
DOI :
10.1109/ULTSYM.1980.197417