• DocumentCode
    2442169
  • Title

    SAW and Boundary Wave Properties for SiO2/LiTaO3Structure Fabricated by Plasma-CVD

  • Author

    Shibayama, K. ; Yamanouchi, K. ; Chujo, W.

  • fYear
    1980
  • fDate
    1980
  • Firstpage
    455
  • Lastpage
    459
  • Keywords
    Argon; Fluid flow; Plasma measurements; Plasma properties; Plasma temperature; Plasma waves; Radio frequency; Substrates; Surface acoustic waves; Transducers;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    1980 Ultrasonics Symposium
  • Type

    conf

  • DOI
    10.1109/ULTSYM.1980.197439
  • Filename
    1534379
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2442169