DocumentCode :
2442169
Title :
SAW and Boundary Wave Properties for SiO2/LiTaO3Structure Fabricated by Plasma-CVD
Author :
Shibayama, K. ; Yamanouchi, K. ; Chujo, W.
fYear :
1980
fDate :
1980
Firstpage :
455
Lastpage :
459
Keywords :
Argon; Fluid flow; Plasma measurements; Plasma properties; Plasma temperature; Plasma waves; Radio frequency; Substrates; Surface acoustic waves; Transducers;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
1980 Ultrasonics Symposium
Type :
conf
DOI :
10.1109/ULTSYM.1980.197439
Filename :
1534379
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2442169
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