DocumentCode
2442553
Title
High wear durability of ECR-sputtered carbon films
Author
Hirono, Soshi ; Umemura, Shin-ichiro ; Andoh, Yasunori ; Hayashi, Teruaki
Author_Institution
NTT Corp.
fYear
1998
fDate
6-9 Jan. 1998
Firstpage
83
Lastpage
83
Keywords
Acceleration; Amorphous materials; Atomic force microscopy; Diamond-like carbon; Magnetic recording; Protection; Radio frequency; Sputtering; Temperature; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
MMM-Intermag Conference, 1998. Abstracts., The 7th Joint
Conference_Location
San Francisco, CA, USA
Print_ISBN
0-7803-5118-5
Type
conf
DOI
10.1109/INTMAG.1998.737098
Filename
737098
Link To Document