Title :
High wear durability of ECR-sputtered carbon films
Author :
Hirono, Soshi ; Umemura, Shin-ichiro ; Andoh, Yasunori ; Hayashi, Teruaki
Author_Institution :
NTT Corp.
Keywords :
Acceleration; Amorphous materials; Atomic force microscopy; Diamond-like carbon; Magnetic recording; Protection; Radio frequency; Sputtering; Temperature; Voltage;
Conference_Titel :
MMM-Intermag Conference, 1998. Abstracts., The 7th Joint
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-7803-5118-5
DOI :
10.1109/INTMAG.1998.737098
