• DocumentCode
    2442658
  • Title

    Deposition of high-durability protective layers with a composite structure of dlc and glc by facing-targets sputtering

  • Author

    Noda, Kentaro ; Kawanabe, Takashi ; Naoe, Masayuki

  • Author_Institution
    Yamato Lab.
  • fYear
    1998
  • fDate
    6-9 Jan. 1998
  • Firstpage
    85
  • Lastpage
    85
  • Keywords
    Argon; Databases; Hard disks; Plasma confinement; Plasma properties; Plasma temperature; Protection; Raman scattering; Spectroscopy; Sputtering;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    MMM-Intermag Conference, 1998. Abstracts., The 7th Joint
  • Conference_Location
    San Francisco, CA, USA
  • Print_ISBN
    0-7803-5118-5
  • Type

    conf

  • DOI
    10.1109/INTMAG.1998.737105
  • Filename
    737105
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2442658