Title :
Calibrating ESCA and Ellipsometric Measurements
Author :
Toney, Michael F. ; Mate, C. ; Pocker, D.
Author_Institution :
Almaden Res. Ctr.
Keywords :
Contamination; Disk drives; Ellipsometry; Lubricants; Magnetic force microscopy; Magnetic heads; Optical films; Pollution measurement; Silicon; Thickness measurement;
Conference_Titel :
MMM-Intermag Conference, 1998. Abstracts., The 7th Joint
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-7803-5118-5
DOI :
10.1109/INTMAG.1998.737115
