DocumentCode
2442850
Title
Calibrating ESCA and Ellipsometric Measurements
Author
Toney, Michael F. ; Mate, C. ; Pocker, D.
Author_Institution
Almaden Res. Ctr.
fYear
1998
fDate
6-9 Jan. 1998
Firstpage
87
Lastpage
87
Keywords
Contamination; Disk drives; Ellipsometry; Lubricants; Magnetic force microscopy; Magnetic heads; Optical films; Pollution measurement; Silicon; Thickness measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
MMM-Intermag Conference, 1998. Abstracts., The 7th Joint
Conference_Location
San Francisco, CA, USA
Print_ISBN
0-7803-5118-5
Type
conf
DOI
10.1109/INTMAG.1998.737115
Filename
737115
Link To Document