DocumentCode
2443067
Title
The research on the performance of the micro-machined gyroscope at low ambient pressure
Author
Zhao, Qiancheng ; Lin, Longtao ; Cui, Jian ; Liu, Dachuan ; Chi, Xiaozhu ; Yan, Guizhen
Author_Institution
Nat. Key Lab. of Micro/Nano Fabrication Technol., Peking Univ., Beijing
fYear
2008
fDate
Nov. 30 2008-Dec. 3 2008
Firstpage
21
Lastpage
24
Abstract
This paper proposed an effective method to test some key parameters of the micro-machined gyroscope at low ambient pressure condition including quality factor, amplitude of the drive signal, bandwidth and scale factor. The results demonstrated that the best working pressure must confine some pressure range.
Keywords
Q-factor; gyroscopes; microsensors; low ambient pressure; micro-machined gyroscope; quality factor; silicon miromechanical gyroscope; Circuit testing; Fabrication; Frequency; Gyroscopes; Notice of Violation; Q factor; Signal analysis; System testing; Vacuum systems; Valves; acuum; cale factor; quality factor; silicon miromechanical gyroscope;
fLanguage
English
Publisher
ieee
Conference_Titel
Sensing Technology, 2008. ICST 2008. 3rd International Conference on
Conference_Location
Tainan
Print_ISBN
978-1-4244-2176-3
Electronic_ISBN
978-1-4244-2177-0
Type
conf
DOI
10.1109/ICSENST.2008.4757066
Filename
4757066
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