Title :
The research on the performance of the micro-machined gyroscope at low ambient pressure
Author :
Zhao, Qiancheng ; Lin, Longtao ; Cui, Jian ; Liu, Dachuan ; Chi, Xiaozhu ; Yan, Guizhen
Author_Institution :
Nat. Key Lab. of Micro/Nano Fabrication Technol., Peking Univ., Beijing
fDate :
Nov. 30 2008-Dec. 3 2008
Abstract :
This paper proposed an effective method to test some key parameters of the micro-machined gyroscope at low ambient pressure condition including quality factor, amplitude of the drive signal, bandwidth and scale factor. The results demonstrated that the best working pressure must confine some pressure range.
Keywords :
Q-factor; gyroscopes; microsensors; low ambient pressure; micro-machined gyroscope; quality factor; silicon miromechanical gyroscope; Circuit testing; Fabrication; Frequency; Gyroscopes; Notice of Violation; Q factor; Signal analysis; System testing; Vacuum systems; Valves; acuum; cale factor; quality factor; silicon miromechanical gyroscope;
Conference_Titel :
Sensing Technology, 2008. ICST 2008. 3rd International Conference on
Conference_Location :
Tainan
Print_ISBN :
978-1-4244-2176-3
Electronic_ISBN :
978-1-4244-2177-0
DOI :
10.1109/ICSENST.2008.4757066
