Inkjet printing of microsensors

Author

Al-Chami, Hussein ; Cretu, Edmond

Author_Institution

Dept. of Electr. & Comput. Eng., Univ. of British Columbia, Vancouver, BC, Canada

fYear

2009

fDate

10-12 June 2009

Firstpage

1

Lastpage

6

Abstract

In the past few years, inkjet printing of microelectronics has been emerging as a cost effective and an environment friendly microfabrication technique. In this paper, inkjet printing of microsensors is investigated, using both resistive and capacitive strain-sensing operating devices. An inexpensive conductive polymer, poly(3,4-ethylenedioxythiophene) oxidized with poly(styrenesulfonate) (PEDOT:PSS) is used as base material for inkjet printing. The experimental characterization shows that the PEDOT:PSS preserves its piezoresistive properties after being printed in thin film patterns, leading to large gauge factors. Stress sensitive interdigitated capacitors fabricated through inkjet printing have as well a high sensitivity and are reported, to our knowledge, for the first time.

Keywords

conducting polymers; ink jet printing; microsensors; PEDOT:PSS; conductive polymer; inkjet printing; microelectronics; microfabrication technique; microsensors; piezoresistive properties; poly(3,4-ethylenedioxythiophene); poly(styrenesulfonate); stress sensitive interdigitated capacitors; Capacitors; Conducting materials; Conductive films; Costs; Microelectronics; Microsensors; Piezoresistance; Polymer films; Printing; Stress;

fLanguage

English

Publisher

ieee

Conference_Titel

Mixed-Signals, Sensors, and Systems Test Workshop, 2009. IMS3TW '09. IEEE 15th International

Conference_Location

Scottsdale, AZ

Print_ISBN

978-1-4244-4618-6

Electronic_ISBN

978-1-4244-4617-9

Type

conf

DOI

10.1109/IMS3TW.2009.5158692

Filename

5158692