Title :
Nonvolatile nanocrystal floating gate memory with NON tunnel barrier
Author :
Baik, Seung Jae ; Choi, Siyoung ; Chung, U-In ; Moon, Joo Tae
Author_Institution :
Memory Div., Samsung Electron. Co. Ltd, Yongin-City, South Korea
Abstract :
The nanocrystal floating gate flash memory has a potential advantage in high-density floating gate memory for its superior scalability over its conventional structure. However, the retention and small sensing window have remained as the main issues for practical applications. In this work, we propose a nitride/oxide/nitride (NON) tunnel barrier, which is more sensitive to the gate bias than the uniform oxide barrier, and present real nonvolatile memory with a 1 V window after 10 years at 85/spl deg/C with programming at 8 V, 10 /spl mu/s and erasing at -8 V, loops.
Keywords :
flash memories; nanoelectronics; random-access storage; silicon compounds; -8 V; 10 mus; 10 year; 8 V; 85 degC; NON tunnel barrier; SiO/sub 2/-Si/sub 3/N/sub 4/; high-density memory scalability; nanocrystal floating gate flash memory; nitride/oxide/nitride tunnel barrier; nonvolatile memory; retention time; sensing window size; CMOS technology; Capacitance-voltage characteristics; Electronic mail; Flash memory cells; Frequency; Moon; Nanocrystals; Nonvolatile memory; Testing; Threshold voltage;
Conference_Titel :
European Solid-State Device Research, 2003. ESSDERC '03. 33rd Conference on
Conference_Location :
Estoril, Portugal
Print_ISBN :
0-7803-7999-3
DOI :
10.1109/ESSDERC.2003.1256925