DocumentCode
2443324
Title
Sputter Deposition of ZnO Thin Films Using Glow Discharge Mass Spectrometry
Author
Aita, Carolyn R.
fYear
1980
fDate
1980
Firstpage
795
Lastpage
800
Keywords
Crystallization; Crystallography; Glow discharges; Mass spectroscopy; Piezoelectric films; Plasma properties; Plasma temperature; Sputtering; Substrates; Zinc oxide;
fLanguage
English
Publisher
ieee
Conference_Titel
1980 Ultrasonics Symposium
Type
conf
DOI
10.1109/ULTSYM.1980.197507
Filename
1534447
Link To Document