Title :
Reactive Magnetron Sputtering of ZnO
Author :
Khuri-Yakub, B.T. ; Smits, J.G.
Keywords :
Acoustic diffraction; Electrons; Magnetic shielding; Optical films; Rough surfaces; Silicon; Sputtering; Surface roughness; X-ray diffraction; Zinc oxide;
Conference_Titel :
1980 Ultrasonics Symposium
DOI :
10.1109/ULTSYM.1980.197508
