DocumentCode :
2443933
Title :
Thin Film ZnO-MOS Transducer with Virtually DC Response
Author :
Chen, P.L. ; Mueller, R.S. ; White, R.M. ; Jolly, R.
fYear :
1980
fDate :
1980
Firstpage :
945
Lastpage :
948
Keywords :
Acoustic transducers; Capacitive sensors; FETs; MOSFETs; Piezoelectric films; Piezoelectric transducers; Silicon compounds; Transistors; Ultrasonic transducers; Zinc oxide;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
1980 Ultrasonics Symposium
Type :
conf
DOI :
10.1109/ULTSYM.1980.197536
Filename :
1534476
Link To Document :
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