DocumentCode
2443933
Title
Thin Film ZnO-MOS Transducer with Virtually DC Response
Author
Chen, P.L. ; Mueller, R.S. ; White, R.M. ; Jolly, R.
fYear
1980
fDate
1980
Firstpage
945
Lastpage
948
Keywords
Acoustic transducers; Capacitive sensors; FETs; MOSFETs; Piezoelectric films; Piezoelectric transducers; Silicon compounds; Transistors; Ultrasonic transducers; Zinc oxide;
fLanguage
English
Publisher
ieee
Conference_Titel
1980 Ultrasonics Symposium
Type
conf
DOI
10.1109/ULTSYM.1980.197536
Filename
1534476
Link To Document