Title :
Thin Film ZnO-MOS Transducer with Virtually DC Response
Author :
Chen, P.L. ; Mueller, R.S. ; White, R.M. ; Jolly, R.
Keywords :
Acoustic transducers; Capacitive sensors; FETs; MOSFETs; Piezoelectric films; Piezoelectric transducers; Silicon compounds; Transistors; Ultrasonic transducers; Zinc oxide;
Conference_Titel :
1980 Ultrasonics Symposium
DOI :
10.1109/ULTSYM.1980.197536