DocumentCode :
2444301
Title :
Acoustic Properties of Amorphous SiHx-Films
Author :
Haumeder, M.V. ; Bhatia, K.L. ; Hunklinger, S.
fYear :
1980
fDate :
1980
Firstpage :
1036
Lastpage :
1039
Keywords :
Absorption; Amorphous materials; Annealing; Attenuation; Mechanical factors; Semiconductor thin films; Sputtering; Substrates; Surface acoustic wave devices; Thin film devices;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
1980 Ultrasonics Symposium
Type :
conf
DOI :
10.1109/ULTSYM.1980.197556
Filename :
1534496
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2444301
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