Title :
Differential injection analysis based on backside-contacted ISFETs
Author :
Acero, M.C. ; Errachid, A. ; Baldi, T. ; Esteve, J. ; Garcia, N. ; Diez-Caballero, T.
Author_Institution :
Centre Nacional de Microelectonica CNM-CSIC, Barcelona, Spain
Abstract :
In this paper a differential injection analysis (DIA) based on ISFETs is presented. The method consists of differential measurements in two parallel micro-cells with identical ISFET sensors connected in the output port. Sample is injected in the first cell as in conventional FIA systems, while in the second cell it is injected as reference buffer. In this way, a simple method for differential measurements is implemented avoiding the need of a reference electrode. By using BSC-ISFET technology integrated with tubular microcell, parallel cells with identical ISFETs are obtained in batch-fabrication.
Keywords :
chemical sensors; ion sensitive field effect transistors; microfluidics; semiconductor device measurement; backside-contacted ISFETs; batch-fabrication; differential injection analysis; output port; parallel micro-cells; reference buffer; reference electrode; tubular microcell; Biosensors; Chemical analysis; Chemical sensors; Chemical technology; Electrodes; Fabrication; Fluid flow measurement; Glass; Pollution measurement; Sensor systems;
Conference_Titel :
Microelectronics, 2001. ICM 2001 Proceedings. The 13th International Conference on
Print_ISBN :
0-7803-7522-X
DOI :
10.1109/ICM.2001.997502
