Title :
A 4.4 GHz SAW Filter Using a Single-Crystal ZnO Film on Sapphire
Author :
Mitsuyu, T. ; Yamazaki, O. ; Wasa, K.
Keywords :
Electrodes; Epitaxial growth; Fabrication; Frequency; SAW filters; Sputtering; Substrates; Surface acoustic wave devices; Surface acoustic waves; Zinc oxide;
Conference_Titel :
1981 Ultrasonics Symposium
Conference_Location :
Chicago, IL, USA
DOI :
10.1109/ULTSYM.1981.197584