DocumentCode :
2444985
Title :
The Production of Surface Acoustic Wave Resonators
Author :
Elliott, Scott ; Mierzwinski, Marek ; Planting, Pete
fYear :
1981
fDate :
14-16 Oct. 1981
Firstpage :
89
Lastpage :
93
Keywords :
Acoustic waves; Aluminum; Electrodes; Fabrication; Packaging; Production; Spectral analysis; Surface acoustic wave devices; Surface acoustic waves; Wafer bonding;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
1981 Ultrasonics Symposium
Conference_Location :
Chicago, IL, USA
Type :
conf
DOI :
10.1109/ULTSYM.1981.197587
Filename :
1534527
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2444985
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