DocumentCode
2444985
Title
The Production of Surface Acoustic Wave Resonators
Author
Elliott, Scott ; Mierzwinski, Marek ; Planting, Pete
fYear
1981
fDate
14-16 Oct. 1981
Firstpage
89
Lastpage
93
Keywords
Acoustic waves; Aluminum; Electrodes; Fabrication; Packaging; Production; Spectral analysis; Surface acoustic wave devices; Surface acoustic waves; Wafer bonding;
fLanguage
English
Publisher
ieee
Conference_Titel
1981 Ultrasonics Symposium
Conference_Location
Chicago, IL, USA
Type
conf
DOI
10.1109/ULTSYM.1981.197587
Filename
1534527
Link To Document