Title :
Pressure and Acceleration Sensitivity of a SAW Interferometer
Author :
Staples, E.J. ; Wise, J. ; DeWames, R.E.
Keywords :
Acceleration; Amplitude modulation; Capacitive sensors; Damping; Electrodes; Fabrication; Frequency; Resonance; Structural beams; Surface acoustic waves;
Conference_Titel :
1981 Ultrasonics Symposium
Conference_Location :
Chicago, IL, USA
DOI :
10.1109/ULTSYM.1981.197600