• DocumentCode
    2446175
  • Title

    AlN Material Constants Evaluation and SAW Properties on AlN/Al2O3and AlN/Si

  • Author

    Tsubouchi, K. ; Sugai, K. ; Mikoshiba, N.

  • fYear
    1981
  • fDate
    14-16 Oct. 1981
  • Firstpage
    375
  • Lastpage
    380
  • Keywords
    Chemical vapor deposition; Dielectrics and electrical insulation; Epitaxial growth; Permittivity; Piezoelectric films; Piezoelectric materials; Silicon; Sputtering; Surface acoustic wave devices; Surface acoustic waves;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    1981 Ultrasonics Symposium
  • Conference_Location
    Chicago, IL, USA
  • Type

    conf

  • DOI
    10.1109/ULTSYM.1981.197646
  • Filename
    1534586
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2446175