Title :
Influence of SiO2-Si Interface States on SAW Transduction in a SiO2-Si Layered Medium Covered with a Piezoelectric Overlay
Keywords :
Admittance; Capacitance; Equivalent circuits; Fluctuations; Interface states; Photonic band gap; Piezoelectric transducers; Silicon; Surface acoustic waves; Zinc oxide;
Conference_Titel :
1981 Ultrasonics Symposium
Conference_Location :
Chicago, IL, USA
DOI :
10.1109/ULTSYM.1981.197666