High Deposition Rate Sputtered ZnO Fin Films for BAW and SAW Applications

Author

Defranould, Ph.

fYear

1981

fDate

14-16 Oct. 1981

Firstpage

483

Lastpage

488

Keywords

Glass; Optical films; Piezoelectric films; Semiconductor films; Silicon; Sputtering; Substrates; Surface acoustic waves; Temperature; Zinc oxide;

fLanguage

English

Publisher

ieee

Conference_Titel

1981 Ultrasonics Symposium

Conference_Location

Chicago, IL, USA

Type

DOI

10.1109/ULTSYM.1981.197668

Filename

1534608

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