DocumentCode
2446689
Title
Plasma-Enhanced Metalorganic Chemical Vapor Deposition of C-Axis Oriented and Epitaxial Films of ZnO at Low Substrate Temperatures
Author
Shiosaki, T. ; Shimizu, M. ; Yamamto, T. ; Yagi, M. ; Kawabata, A.
fYear
1981
fDate
14-16 Oct. 1981
Firstpage
498
Lastpage
501
Keywords
Chemical transducers; Chemical vapor deposition; Optical devices; Optical films; Optical refraction; Plasma chemistry; Plasma temperature; Substrates; Temperature distribution; Zinc oxide;
fLanguage
English
Publisher
ieee
Conference_Titel
1981 Ultrasonics Symposium
Conference_Location
Chicago, IL, USA
Type
conf
DOI
10.1109/ULTSYM.1981.197671
Filename
1534611
Link To Document