DocumentCode :
2446699
Title :
Sputtered AlN Films for Bulk-Acoustic-Wave Devices
Author :
Wang, J.S. ; Lakin, K.M.
fYear :
1981
fDate :
14-16 Oct. 1981
Firstpage :
502
Lastpage :
505
Keywords :
Acoustic measurements; Film bulk acoustic resonators; Frequency; Nitrogen; Piezoelectric films; Plasma devices; Plasma temperature; Semiconductor films; Sputtering; Substrates;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
1981 Ultrasonics Symposium
Conference_Location :
Chicago, IL, USA
Type :
conf
DOI :
10.1109/ULTSYM.1981.197672
Filename :
1534612
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2446699
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