DocumentCode :
2446714
Title :
Low-Temperature Growth of the Piezoelectric AlN Film and Its Optical and Acoustical Properties
Author :
Shiosaki, T. ; Harada, K. ; Kawabata, A.
fYear :
1981
fDate :
14-16 Oct. 1981
Firstpage :
506
Lastpage :
509
Keywords :
Argon; Glass; Optical films; Optical surface waves; Piezoelectric films; Semiconductor films; Sputtering; Substrates; Surface acoustic waves; Temperature dependence;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
1981 Ultrasonics Symposium
Conference_Location :
Chicago, IL, USA
Type :
conf
DOI :
10.1109/ULTSYM.1981.197673
Filename :
1534613
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2446714
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