Title :
Quantitative Flaw Characterization by Means of the Scanning Laser Acoustic Microscope (SLAM)
Author :
Yuhas, D.E. ; Oravecz, M.G. ; Kessler, L.W.
Keywords :
Acoustic materials; Acoustic measurements; Acoustic scattering; Acoustic signal detection; Laser theory; Microscopy; Pulse measurements; Silicon; Simultaneous localization and mapping; Size measurement;
Conference_Titel :
1981 Ultrasonics Symposium
Conference_Location :
Chicago, IL, USA
DOI :
10.1109/ULTSYM.1981.197680
