Title :
Acoustic Microscopy: Recent Applications in Semiconducting Devices
Author :
Attal, J. ; Cambon, G. ; Rouzeyre, M.
Keywords :
Absorption; Acoustic applications; Acoustic devices; Frequency; Lenses; Liquids; Microscopy; Semiconductivity; Silicon; Solid state circuits;
Conference_Titel :
1981 Ultrasonics Symposium
Conference_Location :
Chicago, IL, USA
DOI :
10.1109/ULTSYM.1981.197683
