Title :
Passive integration and RF MEMS: a toolkit for adaptive LC circuits
Author :
Rijks, Th.G.S.M. ; van Beek, J.T.M. ; Ulenaers, M.J.E. ; De Coster, J. ; Puers, R. ; den Dekker, A. ; van Teeffelen, L.
Author_Institution :
Philips Res., Eindhoven, Netherlands
Abstract :
RF MEMS variable capacitors have been realized in an industrialized thin-film process for manufacturing high-quality inductors and capacitors on high-ohmic silicon. The fixed as well as the moveable electrode consists of aluminium, the native aluminium oxide is used as a dielectric. A tuning ratio of 1.35 and a switching ratio up to 29 have been measured. At RF frequencies they show low ohmic losses, which make them very suitable for use in high-quality adaptive LC networks. The feasibility of the application of switched capacitors for load switching in GSM power amplifiers has been demonstrated through simulations based on experimentally derived components and systems parameters.
Keywords :
adaptive systems; aluminium compounds; cellular radio; electrodes; micromechanical devices; passive networks; power amplifiers; radiofrequency integrated circuits; thin film capacitors; thin film inductors; AlO; GSM power amplifiers; RF MEMS variable capacitors; adaptive LC circuits; fixed electrode; high-ohmic silicon; high-quality capacitors; high-quality inductors; industrialized thin-film process; load switching; low ohmic losses; moveable electrode; passive integration; switched capacitors; Capacitors; Dielectric thin films; Electrodes; Manufacturing industries; Manufacturing processes; Radiofrequency microelectromechanical systems; Semiconductor thin films; Silicon; Thin film circuits; Thin film inductors;
Conference_Titel :
Solid-State Circuits Conference, 2003. ESSCIRC '03. Proceedings of the 29th European
Conference_Location :
Estoril, Portugal
Print_ISBN :
0-7803-7995-0
DOI :
10.1109/ESSCIRC.2003.1257124
