DocumentCode
2447819
Title
Experimental Observation of Charge Transfer by Surface Acoustic Wave in a Monolithic Metal/ZnO/Si (MZOS) Device
Author
Augustine, F.L. ; Schwartz, R.J. ; Gunshor, R.L.
fYear
1981
fDate
14-16 Oct. 1981
Firstpage
769
Lastpage
773
Keywords
Acoustic waves; Charge transfer; Fabrication; Optical surface waves; Silicon; Sputtering; Surface acoustic wave devices; Surface acoustic waves; Thickness control; Zinc oxide;
fLanguage
English
Publisher
ieee
Conference_Titel
1981 Ultrasonics Symposium
Conference_Location
Chicago, IL, USA
Type
conf
DOI
10.1109/ULTSYM.1981.197726
Filename
1534666
Link To Document