Title :
Application of IEC61131-3 for semiconductor processing equipment
Author :
Sato, T. ; Yoshida, E. ; Kakebayashi, Y. ; Asakura, J. ; Komoda, Norihisa
Author_Institution :
Dev. Dept., Kobe Steel Ltd., Hyogo, Japan
Abstract :
The control system for the semiconductor processing equipment (SPE) includes multiple functions. It should be linked to the factory production management computer with SECS interface etc, it should have human interface (HMI) for the operator to the machine information and at the same time it should be equipped with real-time machine control. In this paper the control system for the SPE is introduced, in which the IEC61131-3 standard is applied for the real-time control hierarchy. We have developed total control system by using application software effectively on the de facto standard operating system.
Keywords :
IEC standards; network interfaces; production control; semiconductor device manufacture; user interfaces; HMI; IEC61131-3; SECS interface; SPE; application software; control system; factory production management computer; human interface; multiple functions; real-time control hierarchy; real-time machine control; semiconductor processing equipment; standard operating system; total control system; Application software; Computer interfaces; Control systems; Humans; Machine control; Production facilities; Production management; Real time systems; Software standards; Standards development;
Conference_Titel :
Emerging Technologies and Factory Automation, 2001. Proceedings. 2001 8th IEEE International Conference on
Conference_Location :
Antibes-Juan les Pins, France
Print_ISBN :
0-7803-7241-7
DOI :
10.1109/ETFA.2001.997669
