Application of IEC61131-3 for semiconductor processing equipment

Author

Sato, T. ; Yoshida, E. ; Kakebayashi, Y. ; Asakura, J. ; Komoda, Norihisa

Author_Institution

Dev. Dept., Kobe Steel Ltd., Hyogo, Japan

Volume

2

fYear

2001

fDate

15-18 Oct. 2001

Firstpage

47

Abstract

The control system for the semiconductor processing equipment (SPE) includes multiple functions. It should be linked to the factory production management computer with SECS interface etc, it should have human interface (HMI) for the operator to the machine information and at the same time it should be equipped with real-time machine control. In this paper the control system for the SPE is introduced, in which the IEC61131-3 standard is applied for the real-time control hierarchy. We have developed total control system by using application software effectively on the de facto standard operating system.

Keywords

IEC standards; network interfaces; production control; semiconductor device manufacture; user interfaces; HMI; IEC61131-3; SECS interface; SPE; application software; control system; factory production management computer; human interface; multiple functions; real-time control hierarchy; real-time machine control; semiconductor processing equipment; standard operating system; total control system; Application software; Computer interfaces; Control systems; Humans; Machine control; Production facilities; Production management; Real time systems; Software standards; Standards development;

fLanguage

English

Publisher

ieee

Conference_Titel

Emerging Technologies and Factory Automation, 2001. Proceedings. 2001 8th IEEE International Conference on

Conference_Location

Antibes-Juan les Pins, France

Print_ISBN

0-7803-7241-7

Type

conf

DOI

10.1109/ETFA.2001.997669

Filename

997669