DocumentCode :
2448140
Title :
Thermal-Wave Microscopy of Semiconductor Devices
Author :
Rosencwaig, Allan
fYear :
1981
fDate :
14-16 Oct. 1981
Firstpage :
828
Lastpage :
831
Keywords :
Acoustic beams; Acoustic imaging; Acoustic signal detection; Acoustic waves; Frequency; High-resolution imaging; Microscopy; Photothermal effects; Semiconductor devices; Thermoelasticity;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
1981 Ultrasonics Symposium
Conference_Location :
Chicago, IL, USA
Type :
conf
DOI :
10.1109/ULTSYM.1981.197739
Filename :
1534679
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2448140
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