DocumentCode :
2449064
Title :
GHz SAW Transducers with Improved Lithographic Tolerance
Author :
Lewis, B. ; Almar, R.
fYear :
1982
fDate :
27-29 Oct. 1982
Firstpage :
63
Lastpage :
66
Keywords :
Acoustic transducers; Electrodes; Fingers; Fourier transforms; Frequency; Lithography; Metallization; Optical losses; Surface acoustic waves; Ultrasonic transducers;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
1982 Ultrasonics Symposium
Conference_Location :
San Diego, CA, USA
Type :
conf
DOI :
10.1109/ULTSYM.1982.197789
Filename :
1534729
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2449064
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