DocumentCode
2449064
Title
GHz SAW Transducers with Improved Lithographic Tolerance
Author
Lewis, B. ; Almar, R.
fYear
1982
fDate
27-29 Oct. 1982
Firstpage
63
Lastpage
66
Keywords
Acoustic transducers; Electrodes; Fingers; Fourier transforms; Frequency; Lithography; Metallization; Optical losses; Surface acoustic waves; Ultrasonic transducers;
fLanguage
English
Publisher
ieee
Conference_Titel
1982 Ultrasonics Symposium
Conference_Location
San Diego, CA, USA
Type
conf
DOI
10.1109/ULTSYM.1982.197789
Filename
1534729
Link To Document