DocumentCode :
2449695
Title :
Session M1 Microwave MEMS & ICs
Volume :
1
fYear :
2009
fDate :
12-14 Oct. 2009
Firstpage :
301
Lastpage :
301
Abstract :
Start of the above-titled section of the conference proceedings record.
Keywords :
Micromechanical devices;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Semiconductor Conference, 2009. CAS 2009. International
Conference_Location :
Sinaia
ISSN :
1545-827X
Print_ISBN :
978-1-4244-4413-7
Type :
conf
DOI :
10.1109/SMICND.2009.5336541
Filename :
5336541
Link To Document :
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