مرکز منطقه ای اطلاع رساني علوم و فناوري

DocumentCode :

2449775

Title :

SAW Resonators on Silicon

Author :

Martin, S.J. ; Datta, S. ; Gunshor, R.L. ; Pierret, R.F. ; Melloch, M.R. ; Staples, E.J.

fYear :

1982

fDate :

27-29 Oct. 1982

Firstpage :

290

Lastpage :

294

Keywords :

Acoustic scattering; Acoustic transducers; Etching; Optical reflection; Rayleigh scattering; Reflectivity; Silicon; Surface acoustic waves; Surface waves; Zinc oxide;

fLanguage :

English

Publisher :

ieee

Conference_Titel :

1982 Ultrasonics Symposium

Conference_Location :

San Diego, CA, USA

Type :

conf

DOI :

10.1109/ULTSYM.1982.197831

Filename :

1534771

Link To Document :

https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2449775