Title :
Microsensor on single ZnO microwire
Author :
Chai, G. ; Rusu, E. ; Chow, L. ; Stratan, G.I. ; Heinrich, H. ; Park, S. ; Schulte, A. ; Lupan, O. ; Trofim, V. ; Railean, S.
Author_Institution :
Dept. of Phys., Univ. of Central Florida, Orlando, FL, USA
Abstract :
For development of individual ZnO microwire in hydrogen sensors an environmentally benign synthesis process and fabrication route are required. Here we report a synthesis route for ZnO microwires using vapour phase process. Furthermore, our synthesis technique permits microwires to be transferred to other substrates. This offers the possibility of using focused ion beam instrument for handling. We fabricated a single microwire-based sensor and found ~4% sensitive hydrogen 200 ppm in the air at room temperature.
Keywords :
focused ion beam technology; gas sensors; microsensors; zinc compounds; focused ion beam instrument; hydrogen sensors; microsensor; microwire-based sensor; vapour phase process; Electronics industry; Hydrogen; Industrial electronics; Materials science and technology; Microsensors; Railway engineering; Scanning electron microscopy; Temperature sensors; Transmission electron microscopy; Zinc oxide; hydrogen sensors; microwires; vapour phase process; zinc oxide;
Conference_Titel :
Semiconductor Conference, 2009. CAS 2009. International
Conference_Location :
Sinaia
Print_ISBN :
978-1-4244-4413-7
DOI :
10.1109/SMICND.2009.5336549