Title :
An Electrostatic Voltage Sensor Using Surface Acoustic Waves
Author :
Inaba, R. ; Kasahara, Yoshiaki ; Wasa, K.
Keywords :
Acoustic sensors; Acoustic waves; Capacitive sensors; Electrodes; Electrostatics; Frequency; Oscillators; Piezoelectric materials; Surface acoustic waves; Voltage;
Conference_Titel :
1982 Ultrasonics Symposium
Conference_Location :
San Diego, CA, USA
DOI :
10.1109/ULTSYM.1982.197836