DocumentCode
2449952
Title
RF Magnetron Sputtering of ZnO for SAW: Effects of Magnetic Field Strength and Configuration
Author
Anderson, A.C. ; Oates, D.E.
fYear
1982
fDate
27-29 Oct. 1982
Firstpage
329
Lastpage
333
Keywords
Electrons; Magnetic fields; Magnetic films; Magnetic separation; Piezoelectric films; Propagation losses; Radio frequency; Sputtering; Surface acoustic waves; Zinc oxide;
fLanguage
English
Publisher
ieee
Conference_Titel
1982 Ultrasonics Symposium
Conference_Location
San Diego, CA, USA
Type
conf
DOI
10.1109/ULTSYM.1982.197840
Filename
1534780
Link To Document