Title :
RF Magnetron Sputtering of ZnO for SAW: Effects of Magnetic Field Strength and Configuration
Author :
Anderson, A.C. ; Oates, D.E.
Keywords :
Electrons; Magnetic fields; Magnetic films; Magnetic separation; Piezoelectric films; Propagation losses; Radio frequency; Sputtering; Surface acoustic waves; Zinc oxide;
Conference_Titel :
1982 Ultrasonics Symposium
Conference_Location :
San Diego, CA, USA
DOI :
10.1109/ULTSYM.1982.197840