DocumentCode :
2449952
Title :
RF Magnetron Sputtering of ZnO for SAW: Effects of Magnetic Field Strength and Configuration
Author :
Anderson, A.C. ; Oates, D.E.
fYear :
1982
fDate :
27-29 Oct. 1982
Firstpage :
329
Lastpage :
333
Keywords :
Electrons; Magnetic fields; Magnetic films; Magnetic separation; Piezoelectric films; Propagation losses; Radio frequency; Sputtering; Surface acoustic waves; Zinc oxide;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
1982 Ultrasonics Symposium
Conference_Location :
San Diego, CA, USA
Type :
conf
DOI :
10.1109/ULTSYM.1982.197840
Filename :
1534780
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2449952
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