مرکز منطقه ای اطلاع رساني علوم و فناوري - Comparative Evaluation of RF Diode and Magnetron Sputtered ZnO-SiO<inf>2</inf>-Si Structures

DocumentCode :

2449974

Title :

Comparative Evaluation of RF Diode and Magnetron Sputtered ZnO-SiO2-Si Structures

Author :

Cherne, R.D. ; Pierret, R.F. ; Gunshor, R.L. ; Tanielian, M.H. ; Wu, O.K.

fYear :

1982

fDate :

27-29 Oct. 1982

Firstpage :

334

Lastpage :

339

Keywords :

Annealing; Conductive films; Diodes; Laboratories; Magnetic confinement; Magnetic devices; Radio frequency; Sputtering; Substrates; Zinc oxide;

fLanguage :

English

Publisher :

ieee

Conference_Titel :

1982 Ultrasonics Symposium

Conference_Location :

San Diego, CA, USA

Type :

conf

DOI :

10.1109/ULTSYM.1982.197841

Filename :

1534781

Link To Document :