Title :
Zero Temperature Coefficient Surface-Acoustic-Wave Devices Using Epitaxial AlN Films
Author :
Tsubouchi, K. ; Sugai, K. ; Mikoshiba, N.
Keywords :
Delay lines; Electron beams; Optical films; Propagation delay; Silicon; Sputtering; Substrates; Surface acoustic wave devices; Surface acoustic waves; Temperature;
Conference_Titel :
1982 Ultrasonics Symposium
Conference_Location :
San Diego, CA, USA
DOI :
10.1109/ULTSYM.1982.197842