DocumentCode :
2449995
Title :
Zero Temperature Coefficient Surface-Acoustic-Wave Devices Using Epitaxial AlN Films
Author :
Tsubouchi, K. ; Sugai, K. ; Mikoshiba, N.
fYear :
1982
fDate :
27-29 Oct. 1982
Firstpage :
340
Lastpage :
345
Keywords :
Delay lines; Electron beams; Optical films; Propagation delay; Silicon; Sputtering; Substrates; Surface acoustic wave devices; Surface acoustic waves; Temperature;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
1982 Ultrasonics Symposium
Conference_Location :
San Diego, CA, USA
Type :
conf
DOI :
10.1109/ULTSYM.1982.197842
Filename :
1534782
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2449995
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