DocumentCode
2449995
Title
Zero Temperature Coefficient Surface-Acoustic-Wave Devices Using Epitaxial AlN Films
Author
Tsubouchi, K. ; Sugai, K. ; Mikoshiba, N.
fYear
1982
fDate
27-29 Oct. 1982
Firstpage
340
Lastpage
345
Keywords
Delay lines; Electron beams; Optical films; Propagation delay; Silicon; Sputtering; Substrates; Surface acoustic wave devices; Surface acoustic waves; Temperature;
fLanguage
English
Publisher
ieee
Conference_Titel
1982 Ultrasonics Symposium
Conference_Location
San Diego, CA, USA
Type
conf
DOI
10.1109/ULTSYM.1982.197842
Filename
1534782
Link To Document