Characterization of conductor-backed coplanar waveguide using accurate on-wafer measurement techniques

Author

Shih, Y.-C. ; Maher, M.

Author_Institution

Hughes Aircraft Co., Torrance, CA, USA

fYear

1990

fDate

8-10 May 1990

Firstpage

1129

Abstract

The conductor-backed coplanar waveguide has been experimentally characterized using accurate on-wafer S-parameter measurement techniques. An uncertainty analysis was conducted to quantify the measurement errors. The measured characteristic impedance, effective dielectric constant, and attenuation constant are in good agreement with the theory.<>

Keywords

MMIC; S-parameters; electric impedance measurement; integrated circuit testing; measurement errors; microwave measurement; permittivity measurement; waveguides; CPW; MMIC application; S-parameter measurement techniques; attenuation constant; characteristic impedance; conductor-backed coplanar waveguide; effective dielectric constant; measurement errors; on-wafer measurement techniques; scattering parameters; uncertainty analysis; Coplanar waveguides; Electrooptical waveguides; Impedance; Measurement errors; Measurement techniques; Probes; Scattering parameters; Testing; Transmission lines; Uncertainty;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Symposium Digest, 1990., IEEE MTT-S International

Conference_Location

Dallas, TX

Type

conf

DOI

10.1109/MWSYM.1990.99778

Filename

99778

Link To Document

https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2450229