Title :
Sputtered C-Axis Inclined ZnO Films for Shear Wave Resonators
Author :
Wang, J.S. ; Lakin, K.M.
Keywords :
Anodes; Cathodes; Piezoelectric films; Semiconductor films; Sputtering; Substrates; Surface acoustic waves; Temperature; Voltage; Zinc oxide;
Conference_Titel :
1982 Ultrasonics Symposium
Conference_Location :
San Diego, CA, USA
DOI :
10.1109/ULTSYM.1982.197872
