Title :
Two-Dimensional Theory of Thin-Film ZnO Resonators on Silicon
Keywords :
Biomembranes; Electrodes; Equations; Frequency; Gold; Semiconductor thin films; Silicon; Tensile stress; Titanium; Zinc oxide;
Conference_Titel :
1982 Ultrasonics Symposium
Conference_Location :
San Diego, CA, USA
DOI :
10.1109/ULTSYM.1982.197873
