Two-Dimensional Theory of Thin-Film ZnO Resonators on Silicon

Author

Milsom, R.F.

fYear

1982

fDate

27-29 Oct. 1982

Firstpage

484

Lastpage

489

Keywords

Biomembranes; Electrodes; Equations; Frequency; Gold; Semiconductor thin films; Silicon; Tensile stress; Titanium; Zinc oxide;

fLanguage

English

Publisher

ieee

Conference_Titel

1982 Ultrasonics Symposium

Conference_Location

San Diego, CA, USA

Type

DOI

10.1109/ULTSYM.1982.197873

Filename

1534813

Link To Document