DocumentCode

2450550

Title

Spurious Resonances in Bulk Acoustic Wave Resonators

Author

Yoo, K.B. ; Überall, H. ; Williams, W., Jr.

fYear

1982

fDate

27-29 Oct. 1982

Firstpage

490

Lastpage

493

Keywords

Acoustic devices; Acoustic waves; Electrodes; Etching; Frequency; Physics; Resonance; Resonator filters; Silicon; Zinc oxide;

fLanguage

English

Publisher

ieee

Conference_Titel

1982 Ultrasonics Symposium

Conference_Location

San Diego, CA, USA

Type

conf

DOI

10.1109/ULTSYM.1982.197874

Filename

1534814