DocumentCode
245183
Title
Best Paper Award
fYear
2014
fDate
20-23 Jan. 2014
Firstpage
1
Lastpage
1
Abstract
The Best Paper Award winner is "Flexible Packed Stencil Design with Multiple Shaping Apertures for E-Beam Lithography" by Chris Chu (Iowa State Univ., USA), Wai-Kei Mak (National Tsing Hua Univ., Taiwan).
fLanguage
English
Publisher
ieee
Conference_Titel
Design Automation Conference (ASP-DAC), 2014 19th Asia and South Pacific
Conference_Location
Singapore
Type
conf
DOI
10.1109/ASPDAC.2014.6742841
Filename
6742841
Link To Document