Effects of Structure Parameters and Stress for Capacitive Switches MEMS Bridge on Time Response

In this paper, a novel method for analyzing the switching time of the electrostatic driven RF MEMS capacitive switches is presented. The effects of the structure parameters which mainly include the width, length and thickness and stress for capacitive switches MEMS bridge on time response are investigated using the SYNPLE module of IntelliSuitetrade tool. The result shows that the width of MEMS bridge and the stress in bridge indistinctively affect on time response, while the length and thickness of MEME bridge distinctively effect on time response.